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1

Tin laser-produced plasma as the light source for extreme ultraviolet lithography high-volume manufacturing: history, ideal plasma, present status, and prospects

Tomie, Toshihisa

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2012

Language:

english

File:

PDF, 1.71 MB

english, 2012

2

KrF laser beam smoothing and accelerated target measurement

Isao Matsushima, Eiichi Takahashi, Yuji Matsumoto, Isao Okuda, Toshihisa Tomie, Yoshiro Owadano

Journal:

Fusion Engineering and Design

Year:

1999

Language:

english

File:

PDF, 351 KB

english, 1999

3

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Emerging Lithographic Technologies VII - Use of tin as a plasma source material for high conversion efficiency

Tomie, Toshihisa, Aota, Tatsuya, Ueno, Yoshifumi, Niimi, Gohta, Yashiro, Hidehiko, Lin, Jingqian, Matsushima, Isao, Komiyama, Kazumasa, Lee, Dong-Hoon, Nishigori, Kentaro, Yokota, Hiroshi, Engelstad,

Year:

2003

Language:

english

File:

PDF, 472 KB

english, 2003

4

Sensitivity-Limiting Factors of at-Wavelength Extreme Ultraviolet Lithography Mask Blank Inspection

Tezuka, Yoshihiro, Tanaka, Toshihiko, Terasawa, Tsuneo, Tomie, Toshihisa

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 312 KB

english, 2006

5

Plasma dynamics in the initial stage of a laser-triggered discharge-plasma

Xie, Zhuo, Wu, Jiazhi, Dou, Yinping, Lin, Jingquan, Tomie, Toshihisa

Journal:

Journal of Applied Physics

Year:

2018

Language:

english

File:

PDF, 3.28 MB

english, 2018

6

X-ray Spectroscopic Measurements of 10ns KrF Laser Produced Plasma

Isao Matsushima, Hidehiko Yashiro, Toshihisa Tomie, Isao Okuda, Yuji Matsmoto, Eisuke Miura, Yoshiro Owadano

Journal:

Contributions to Plasma Physics

Year:

1993

Language:

english

File:

PDF, 187 KB

english, 1993

7

Evidence for creatine biosynthesis in Müller glia

Toshihisa Nakashima, Masatoshi Tomi, Masanori Tachikawa, Masahiko Watanabe, Tetsuya Terasaki, Ken-ichi Hosoya

Journal:

Year:

2005

Language:

english

File:

PDF, 302 KB

english, 2005

8

Two-dimensional beam smoothing by broadband random-phase irradiation

Isao Matsushima, Toshihisa Tomie, Yuji Matsumoto, Isao Okuda, Eisuke Miura, Hidehiko Yashiro, Eiichi Takahashi, Yoshiro Owadano

Journal:

Optics Communications

Year:

1995

Language:

english

File:

PDF, 391 KB

english, 1995

9

The birth of the X-ray refractive lens

Toshihisa Tomie

Journal:

Spectrochimica Acta Part B: Atomic Spectroscopy

Year:

2010

Language:

english

File:

PDF, 1.60 MB

english, 2010

10

Blood-to-retina transport of creatine via creatine transporter (CRT) at the rat inner blood–retinal barrier

Toshihisa Nakashima, Masatoshi Tomi, Kazunori Katayama, Masanori Tachikawa, Masahiko Watanabe, Tetsuya Terasaki, Ken-ichi Hosoya

Journal:

Journal of Neurochemistry

Year:

2004

Language:

english

File:

PDF, 247 KB

english, 2004

11

10 kHz 40 W Ti:sapphire regenerative ring amplifier

Matsushima, Isao, Yashiro, Hidehiko, Tomie, Toshihisa

Journal:

Year:

2006

Language:

english

File:

PDF, 148 KB

english, 2006

12

Observation of chemical shifts of Si 2p level by an x-ray photoelectron spectroscopy system with a laser-plasma x-ray source

Kondo, Hiroyuki, Tomie, Toshihisa, Shimizu, Hideaki

Journal:

Applied Physics Letters

Year:

1998

Language:

english

File:

PDF, 292 KB

english, 1998

13

Ultimate Efficiency of Extreme Ultraviolet Radiation from a Laser-Produced Plasma

Aota, Tatsuya, Tomie, Toshihisa

Journal:

Physical Review Letters

Year:

2005

Language:

english

File:

PDF, 128 KB

english, 2005

14

Actinic Phase Defect Detection for Extreme Ultraviolet Lithography Mask with Absorber Patterns

Terasawa, Tsuneo, Yamane, Takeshi, Tanaka, Toshihiko, Suga, Osamu, Tomie, Toshihisa

Journal:

Japanese Journal of Applied Physics

Year:

2010

Language:

english

File:

PDF, 760 KB

english, 2010

15

[IEEE 2008 XXIII International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV 2008) - Bucharest, Romania (2008.09.15-2008.09.19)] 2008 23rd International Symposium on Discharges and Electrical Insulation in Vacuum - Detection of ultra-low-level surface contamination using Extreme Ultraviolet photoelectron spectroscopy

Dong-Hoon Lee,, Toshihisa Tomie,, Byung-Wook Park,, Jessie Darma,, Youl-Moon Sung,

Year:

2008

Language:

english

File:

PDF, 355 KB

english, 2008

16

Actinic Mask Blank Inspection and Signal Analysis for Detecting Phase Defects Down to 1.5 nm in Height

Terasawa, Tsuneo, Yamane, Takeshi, Tanaka, Toshihiko, Iwasaki, Teruo, Suga, Osamu, Tomie, Toshihisa

Journal:

Japanese Journal of Applied Physics

Year:

2009

Language:

english

File:

PDF, 341 KB

english, 2009

17

Time of flight photoelectron spectroscopy with a laser-plasma x-ray source

Kondo, Hiroyuki, Tomie, Toshihisa, Shimizu, Hideaki

Journal:

Applied Physics Letters

Year:

1996

Language:

english

File:

PDF, 315 KB

english, 1996

18

Electronic states of thiophene/phenylene co-oligomers: Extreme-ultra violet excited photoelectron spectroscopy observations and density functional theory calculations

Kawaguchi, Yoshizo, Sasaki, Fumio, Mochizuki, Hiroyuki, Ishitsuka, Tomoaki, Tomie, Toshihisa, Ootsuka, Teruhisa, Watanabe, Shuji, Shimoi, Yukihiro, Yamao, Takeshi, Hotta, Shu

Journal:

Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 1.32 MB

english, 2013

19

[IEEE 2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference - Long Beach, CA, USA (2006.05.21-2006.05.26)] 2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference - 10 kHz 40W Ti:Sapphire regenerative ring amplifier

Isao Matsushima,, Hidehiko Yashiro,, Toshihisa Tomie,

Year:

2006

Language:

english

File:

PDF, 309 KB

english, 2006

20

Two-dimensional beam smoothing technique for KrF laser systems

Matsushima, Isao, Yashiro, Hidehiko, Tomie, Toshihisa, Okuda, Isao, Matsumoto, Yuji, Miura, Eisuke, Takahashi, Eiichi, Owadano, Yoshiro

Journal:

Laser and Particle Beams

Year:

1996

Language:

english

File:

PDF, 551 KB

english, 1996

21

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Metrology, Inspection, and Process Control for Microlithography XVII - Concept of ultra-fast at-wavelength inspection of defects on a multilayer mask using a laser-produced plasma source

Tomie, Toshihisa, Terasawa, Tsuneo, Tezuka, Yoshihiro, Ito, Masaaki, Herr, Daniel J.

Year:

2003

Language:

english

File:

PDF, 288 KB

english, 2003

22

Actively Mode-Locked and Q -Switched Phosphate Glass Oscillator

Tomie, Toshihisa, Kasai, Takeshi, Yano, Masaaki

Journal:

Japanese Journal of Applied Physics

Year:

1984

File:

PDF, 507 KB

1984

23

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Emerging Lithographic Technologies X - EUV generation using a droplet of a suspension including tin as a target of a high-efficiency LPP source for high volume production

Tomie, Toshihisa, Sarjono, S., Yashiro, H., Moriwaki, H., Matsushima, I., Lercel, Michael J.

Year:

2006

Language:

english

File:

PDF, 243 KB

english, 2006

24

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Emerging Lithographic Technologies VII - Experimental evaluation of a stopping power of high-energy ions from a laser-produced plasma by a magnetic field

Niimi, Gohta, Ueno, Yoshifumi, Nishigori, Kentaro, Aota, Tatsuya, Yashiro, Hidehiko, Tomie, Toshihisa, Engelstad, Roxann L.

Year:

2003

Language:

english

File:

PDF, 699 KB

english, 2003

25

SPIE Proceedings [SPIE Optical Science, Engineering and Instrumentation '97 - San Diego, CA (Sunday 27 July 1997)] Applications of X Rays Generated from Lasers and Other Bright Sources - X-ray photoelectron spectroscopy with a laser plasma source

Tomie, Toshihisa, Kondo, Hiroyuki, Shimizu, Hideaki, Lu, Peixiang, Kyrala, George A., Gauthier, Jean-Claude J.

Year:

1997

Language:

english

File:

PDF, 644 KB

english, 1997

26

AIP Conference Proceedings [AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011 - Grenoble (France) (23–26 May 2011)] - Observation of Work Functions, Metallicity, Band Bending, Interfacial Dipoles by EUPS for Characterizing High-k∕Metal Interfaces

Tomie, Toshihisa, Ishitsuka, Tomoaki, Ootsuka, Teruhisa, Ota, Hiroyuki, Seiler, David G., Diebold, Alain C., McDonald, Robert, Chabli, Amal, Secula, Erik M.

Year:

2011

Language:

english

File:

PDF, 684 KB

english, 2011

27

Supply of a particle-included droplet as laser plasma target for extreme ultraviolet emission

Lin, Jingquan, Tomie, Toshihisa

Journal:

Journal of Physics D Applied Physics

Year:

2009

Language:

english

File:

PDF, 196 KB

english, 2009

28

Enhancement of EUV emission intensity from particles in a droplet by exploding the droplet

Lin, Jingquan, Tomie, Toshihisa

Journal:

Journal of Physics D Applied Physics

Year:

2009

Language:

english

File:

PDF, 202 KB

english, 2009

29

Actively Mode-Locked and Q-Switched YAG Laser with Precise Synchronizability

Tomie, Toshihisa, Kasai, Takeshi, Yano, Masaaki

Journal:

Japanese Journal of Applied Physics

Year:

1983

Language:

english

File:

PDF, 497 KB

english, 1983

30

A 37% Efficiency, Kilohertz Repetition Rate Cryogenically Cooled Ti:Sapphire Regenerative Amplifier

Matsushima, Isao, Yashiro, Hidehiko, Tomie, Toshihisa

Journal:

Japanese Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 275 KB

english, 2005

31

Stable Mode-Locked Phosphate Glass Laser Oscillator

Tomie, Toshihisa, Yano, Masaaki

Journal:

Japanese Journal of Applied Physics

Year:

1981

Language:

english

File:

PDF, 262 KB

english, 1981

32

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Emerging Lithographic Technologies VII - Strong narrowband peak at 13.5-nm generated in a cavity-confined tin plasma

Aota, Tatsuya, Yashiro, Hidehiko, Ueno, Yoshifumi, Tomie, Toshihisa, Engelstad, Roxann L.

Year:

2003

Language:

english

File:

PDF, 422 KB

english, 2003

33

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Particle-cluster tin target for a high conversion efficiency LPP source for EUVL

Tomie, Toshihisa, Aota, Tatsuya, Lin, Jing Quan, Ueno, Yoshifumi, Yashiro, Hidehiko, Kandaka, Noriaki, Moriwaki, Hiroki, Niimi, Gohta, Matsushima, Isao, Nishigori, Kentaro, Mackay, R. Scott

Year:

2004

Language:

english

File:

PDF, 401 KB

english, 2004

34

Effects of pn Doping in Thiophene/Phenylene Co-oligomers Thin Films

Sasaki, Fumio, Kawaguchi, Yoshizo, Mochizuki, Hiroyuki, Haraichi, Satoshi, Ishitsuka, Tomoaki, Ootsuka, Teruhisa, Tomie, Toshihisa, Watanabe, Shuji, Shimoi, Yukihiro, Yamao, Takeshi, Hotta, Shu

Journal:

Molecular Crystals and Liquid Crystals

Year:

2015

Language:

english

File:

PDF, 543 KB

english, 2015

35

SPIE Proceedings [SPIE Optical Science, Engineering and Instrumentation '97 - San Diego, CA (Sunday 27 July 1997)] Applications of X Rays Generated from Lasers and Other Bright Sources - Exploding-type pumping of plasma for high-efficiency x-ray laser

Tomie, Toshihisa, Yashiro, Hidehiko, Miura, Eisuke, Lu, Peixiang, Matsushima, Isao, Kyrala, George A., Gauthier, Jean-Claude J.

Year:

1997

Language:

english

File:

PDF, 659 KB

english, 1997

36

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Actinic detection of multilayer defects on EUV mask blanks using LPP light source and dark-field imaging

Tezuka, Yoshihiro, Ito, Masaaki, Terasawa, Tsuneo, Tomie, Toshihisa, Mackay, R. Scott

Year:

2004

Language:

english

File:

PDF, 294 KB

english, 2004

37

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Emerging Lithographic Technologies XI - Detection signal analysis of actinic inspection of EUV mask blanks using dark-field imaging

Tanaka, Toshihiko, Lercel, Michael J., Terasawa, Tsuneo, Iriki, Nobuyuki, Aoyama, Hajime, Tomie, Toshihisa

Year:

2007

Language:

english

File:

PDF, 736 KB

english, 2007

38

SPIE Proceedings [SPIE Photonics West '95 - San Jose, CA (Wednesday 1 February 1995)] Scanning Probe Microscopies III - Morphological changes of wrasse sperm axoneme after their motility initiation observed with use of atomic force microscopy

Shimizu, Hideaki, Majima, Toshikazu, Takai, Hiroyuki, Inaba, Kazuo, Tomie, Toshihisa, Vaez-Iravani, Mehdi

Year:

1995

Language:

english

File:

PDF, 420 KB

english, 1995

39

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Emerging Lithographic Technologies VII - Ultra fast ion shutter employing a laser-produced plasma

Yashiro, Hidehiko, Aota, Tatsuya, Nishigori, Kentaro, Ueno, Yoshifumi, Tomie, Toshihisa, Engelstad, Roxann L.

Year:

2003

Language:

english

File:

PDF, 605 KB

english, 2003

40

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Metrology, Inspection, and Process Control for Microlithography XX - Detection signal analysis of actinic inspection of EUV mask blanks using dark-field imaging

Tanaka, Toshihiko, Archie, Chas N., Tezuka, Yoshihiro, Terasawa, Tsuneo, Tomie, Toshihisa

Year:

2006

Language:

english

File:

PDF, 872 KB

english, 2006

41

SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Monday 6 October 2008)] Photomask Technology 2008 - Signal analysis for the actinic full-field EUVL mask blank inspection system

Yamane, Takeshi, Kawahira, Hiroichi, Zurbrick, Larry S., Iwasaki, Teruo, Tanaka, Toshihiko, Terasawa, Tsuneo, Suga, Osamu, Tomie, Toshihisa

Year:

2008

Language:

english

File:

PDF, 597 KB

english, 2008

42

SPIE Proceedings [SPIE BiOS '97, Part of Photonics West - San Jose, CA (Saturday 8 February 1997)] Functional Imaging and Optical Manipulation of Living Cells - X-ray imaging of living cells

Majima, Toshikazu, Shimizu, Hideaki, Tomie, Toshihisa, Miura, Eisuke, Kanayama, Toshihiko, Yamada, Masahiro, Farkas, Daniel L., Tromberg, Bruce J.

Year:

1997

Language:

english

File:

PDF, 916 KB

english, 1997

43

SPIE Proceedings [SPIE SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 9 July 1995)] Applications of Laser Plasma Radiation II - High-resolution imaging of the ultrastructure of living algal cells using soft x-ray contact microscopy

Ford, Thomas W., Cotton, Robin A., Page, Anton M., Tomie, Toshihisa, Majima, Toshikazu, Stead, Anthony D., Richardson, Martin C., Kyrala, George A.

Year:

1995

Language:

english

File:

PDF, 2.54 MB

english, 1995

44

SPIE Proceedings [SPIE Photomask and Next Generation Lithography Mask Technology XI - Yokohama, Japan (Wednesday 14 April 2004)] Photomask and Next-Generation Lithography Mask Technology XI - Actinic detection and screening of multilayer defects on EUV mask blanks using dark-field imaging

Tezuka, Yoshihiro, Tanabe, Hiroyoshi, Ito, Masaaki, Terasawa, Tsuneo, Tomie, Toshihisa

Year:

2004

Language:

english

File:

PDF, 415 KB

english, 2004

45

SPIE Proceedings [SPIE Advanced Laser Technologies 2007 - Levi, Finland (Monday 3 September 2007)] Advanced Laser Technologies 2007 - 10 kHz 54 W Ti:sapphire regenerative amplifier as a pumping laser of a laser-plasma x-ray source

Shcherbakov, Ivan A., Matsushima, Isao, Yashiro, Hidehiko, Myllylä, Risto, Priezzhev, Alexander V., Tomie, Toshihisa, Kinnunen, Matti, Pustovoy, Vladimir I., Kirillin, Mikhail Y., Popov, Alexey P.

Year:

2007

Language:

english

File:

PDF, 553 KB

english, 2007

46

SPIE Proceedings [SPIE Photomask and NGL Mask Technology XV - Yokohama, Japan (Wednesday 16 April 2008)] Photomask and Next-Generation Lithography Mask Technology XV - Impact of mask blank and mirror surface roughness on actinic EUVL mask blank inspection signal

Yamane, Takeshi, Horiuchi, Toshiyuki, Tanaka, Toshihiko, Terasawa, Tsuneo, Suga, Osamu, Tomie, Toshihisa

Year:

2008

Language:

english

File:

PDF, 399 KB

english, 2008

47

SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Soft X-Ray Microscopy - Flash contact x-ray microscopy of biological specimen in water

Tomie, Toshihisa, Shimizu, Hazime, Majima, Toshikazu, Kanayama, Toshihiko, Yamada, Mitsuo, Miura, Eisuke, Jacobsen, Chris J., Trebes, James E.

Year:

1993

Language:

english

File:

PDF, 733 KB

english, 1993

48

SPIE Proceedings [SPIE Photomask and Next-Generation Lithography Mask Technology XIV - Yokohama, Japan (Tuesday 17 April 2007)] Photomask and Next-Generation Lithography Mask Technology XIV - Multilayer bottom topography effect on actinic mask-blank inspection signal

Terasawa, Tsuneo, Tanaka, Toshihiko, Suga, Osamu, Tomie, Toshihisa, Watanabe, Hidehiro

Year:

2007

Language:

english

File:

PDF, 512 KB

english, 2007

49

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Ultrashort Wavelength Lasers - High-density aluminum plasma produced by a picosecond KrF laser pulse

Tomie, Toshihisa, Okuda, Isao, Matsushima, Isao, Owadano, Yoshiro, Staffin, R., Yano, M., Kondo, H., Broughton, James N., Suckewer, Szymon

Year:

1992

Language:

english

File:

PDF, 713 KB

english, 1992

50

SPIE Proceedings [SPIE Photomask and NGL Mask Technology XVI - Yokohama, Japan (Wednesday 8 April 2009)] Photomask and Next-Generation Lithography Mask Technology XVI - Actinic EUVL mask blank inspection and phase defect characterization

Yamane, Takeshi, Hosono, Kunihiro, Iwasaki, Teruo, Tanaka, Toshihiko, Terasawa, Tsuneo, Suga, Osamu, Tomie, Toshihisa

Year:

2009

Language:

english

File:

PDF, 333 KB

english, 2009